JPH0481645U - - Google Patents
Info
- Publication number
- JPH0481645U JPH0481645U JP12432490U JP12432490U JPH0481645U JP H0481645 U JPH0481645 U JP H0481645U JP 12432490 U JP12432490 U JP 12432490U JP 12432490 U JP12432490 U JP 12432490U JP H0481645 U JPH0481645 U JP H0481645U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum processing
- buffer chamber
- exhaust device
- orifice
- processing apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000002955 isolation Methods 0.000 claims description 2
- 238000004868 gas analysis Methods 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12432490U JPH0481645U (en]) | 1990-11-28 | 1990-11-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12432490U JPH0481645U (en]) | 1990-11-28 | 1990-11-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0481645U true JPH0481645U (en]) | 1992-07-16 |
Family
ID=31871982
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12432490U Pending JPH0481645U (en]) | 1990-11-28 | 1990-11-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0481645U (en]) |
-
1990
- 1990-11-28 JP JP12432490U patent/JPH0481645U/ja active Pending
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